解説 超高速2GHZ LSIを実現するための0.1μmプロセス用絶縁材料の開発に成功--ナノメートルオーダーの空洞の形状制御技術" Nanocavity"
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- Material Type
- 記事
- Author/Editor
- 成澤 俊明福山 俊一松浦 東
- Periodical title
- 化学と工業 = Chemistry & chemical industry
- No. or year of volume/issue
- 53(3) 2000.03
- Volume
- 53
- Issue
- 3
- Pages
- 287～289
- Publication date of volume/issue (W3CDTF)
- 2000-03