シリコンプラズマ酸化過程のTight-binding分子動力学シミュレーション
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- Material Type
- 記事
- Author/Editor
- 山田 有場杉左近 潔遠藤 明 他
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 21(4) 2000.04
- Volume
- 21
- Issue
- 4
- Pages
- 188～192
- Publication date of volume/issue (W3CDTF)
- 2000-04