低誘導率層間絶縁膜のプラズマ化学気相堆積
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- Material Type
- 記事
- Title
- Author/Editor
- 白藤 立林 康明西野 茂弘
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 43(4) 2000.04
- Volume
- 43
- Issue
- 4
- Pages
- 504～511
- Publication date of volume/issue (W3CDTF)
- 2000-04