Volume number36(8) 2000.8
シリコン単結晶の異方...

シリコン単結晶の異方性エッチングを用いた微小段差基準片

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シリコン単結晶の異方性エッチングを用いた微小段差基準片

Call No. (NDL)
Z14-482
Bibliographic ID of National Diet Library
5448709
Material type
記事
Author
初沢 毅ほか
Publisher
東京 : 計測自動制御学会 ; [1965]-
Publication date
2000-08
Material Format
Paper
Journal name
計測自動制御学会論文集 = Transactions of the Society of Instrument and Control Engineers 36(8) 2000.8
Publication Page
p.645~649
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Paper

Material Type
記事
Author/Editor
初沢 毅
井上 尚紀
早瀬 仁則 他
Periodical title
計測自動制御学会論文集 = Transactions of the Society of Instrument and Control Engineers
No. or year of volume/issue
36(8) 2000.8
Volume
36
Issue
8
Pages
645~649
Publication date of volume/issue (W3CDTF)
2000-08