摩擦力顕微鏡機構による極微細加工とアルカリエッチングを併用した単結晶シリコンへのマスクレスパターン形成
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- Material Type
- 記事
- Author/Editor
- 陳 利益森田 昇芦田 極
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 66(11) (通号 791) 2000.11
- Volume
- 66
- Issue
- 11
- Sequential issue number
- 791
- Pages
- 1807～1811