新技術・新製品 MEMS用ミクロンサイズ超微小材料に対する疲労および破壊靭性評価試験装置の開発
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- Material Type
- 記事
- Author/Editor
- 高島 和希肥後 矢吉杉浦 眞佐 他
- Periodical title
- まてりあ = Materia Japan
- No. or year of volume/issue
- 40(2) 2001.2
- Volume
- 40
- Issue
- 2
- Pages
- 184～186
- Publication date of volume/issue (W3CDTF)
- 2001-02