高周波無声放電のマイクロ放電観測とオゾン生成効率の改善
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- Material Type
- 記事
- Author/Editor
- 野間 喜樹後藤 圭二山形 幸彦 他
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 121(4) 2001.4
- Volume
- 121
- Issue
- 4
- Pages
- 366～371
- Publication date of volume/issue (W3CDTF)
- 2001-04