研究紹介 ラダー電極...

研究紹介 ラダー電極を用いた大面積均一VHFプラズマの生成と製膜への応用

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研究紹介 ラダー電極を用いた大面積均一VHFプラズマの生成と製膜への応用

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
5730542
Material type
記事
Author
河合 良信ほか
Publisher
東京 : 応用物理学会
Publication date
2001-04
Material Format
Paper
Journal name
応用物理 70(4) 2001.4
Publication Page
p.438~442
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Paper

Material Type
記事
Author/Editor
河合 良信
村田 正義
竹内 良昭 他
Periodical title
応用物理
No. or year of volume/issue
70(4) 2001.4
Volume
70
Issue
4
Pages
438~442
Publication date of volume/issue (W3CDTF)
2001-04