大気圧プラズマCVD法によるアモルファスSiの高速成膜に関する研究(第3報)高速形成aSi薄膜の電気・光学特性
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- Material Type
- 記事
- Author/Editor
- 森 勇藏芳井 熊安安武 潔 他
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 67(5) (通号 797) 2001.5
- Volume
- 67
- Issue
- 5
- Sequential issue number
- 797
- Pages
- 829～833