高周波マグネトロンスパッタリングによる遷移金属窒化物・炭化物薄膜の作製と冷陰極材料としての評価

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高周波マグネトロンスパッタリングによる遷移金属窒化物・炭化物薄膜の作製と冷陰極材料としての評価

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
6043646
Material type
記事
Author
後藤 康仁ほか
Publisher
東京 : 電子情報通信学会
Publication date
2001-12-14
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 101(501) 2001.12.14
Publication Page
p.45~50
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Paper

Material Type
記事
Author/Editor
後藤 康仁
紀和 伸政
中原 宏勲 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
101(501) 2001.12.14
Volume
101
Issue
501
Pages
45~50
Publication date of volume/issue (W3CDTF)
2001-12-14