YAGレーザーによる...

YAGレーザーによる微細加工の研究

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YAGレーザーによる微細加工の研究

Call No. (NDL)
Z14-307
Bibliographic ID of National Diet Library
6096754
Material type
記事
Author
矢野 雅昭ほか
Publisher
広島 : 広島工業大学
Publication date
2002-02
Material Format
Paper
Journal name
広島工業大学紀要. 研究編 36 2002.02
Publication Page
p.31~35
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Paper

Material Type
記事
Author/Editor
矢野 雅昭
越智 秋雄
中本 修樹 他
Periodical title
広島工業大学紀要. 研究編
No. or year of volume/issue
36 2002.02
Volume
36
Pages
31~35
Publication date of volume/issue (W3CDTF)
2002-02
ISSN (Periodical Title)
1346-9975