臭素によるSi(111)表面のエッチング過程の高感度測定 (第42回真空に関する連合講演会プロシーディングス)
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- Material Type
- 記事
- Author/Editor
- 中島 俊信首藤 健一白尾 徹郎 他
- Series Title
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 45(3) 2002.3
- Volume
- 45
- Issue
- 3
- Pages
- 192～195