スピンドルスルー型磁極を用いた平面磁気研磨--研磨性能に及ぼす粒子ブラシの影響

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スピンドルスルー型磁極を用いた平面磁気研磨--研磨性能に及ぼす粒子ブラシの影響

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
6242083
Material type
記事
Author
川久保 英樹ほか
Publisher
東京 : 砥粒加工学会
Publication date
2002-08
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 46(8) (通号 240) 2002.8
Publication Page
p.401~406
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Paper Digital

Material Type
記事
Author/Editor
川久保 英樹
土屋 和博
佐藤 運海 他
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
46(8) (通号 240) 2002.8
Volume
46
Issue
8
Sequential issue number
240
Pages
401~406