清浄空間における精密機械加工無酸素銅電極の真空中絶縁破壊特性 (特集:真空放電とマイクロエレクトロニクス)
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- Material Type
- 記事
- Author/Editor
- 山本 貴志大塚 尚弘山納 康 他
- Series Title
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 123(5) 2003.5
- Volume
- 123
- Issue
- 5
- Pages
- 468～474