Simulation Analysis and Experimental Verification of UV-LIGA Process for High-Aspect-Ratio Ni-Fe Micro-Mold Insert
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- Material Type
- 記事
- Author/Editor
- Yih-Min YehGeorge-Chia TuMing-Nan Fu
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 42(10) (通号 584) 2003.10
- Volume
- 42
- Issue
- 10
- Sequential issue number
- 584
- Pages
- 6683～6690