プラズマによる微細針状シリコンの形成 (特集 プラズマ応用の新しい展開)
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- Material Type
- 記事
- Title
- Author/Editor
- 八田 章光藤森 洋行
- Series Title
- Periodical title
- 電気学会誌 = The journal of the Institute of Electrical Engineers of Japan
- No. or year of volume/issue
- 123(10) 2003.10
- Volume
- 123
- Issue
- 10
- Pages
- 656～659