極浅領域の深さ方向分析用多層BNデルタドープ標準物質とそれによるスパッタ速度変化の評価
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- Material Type
- 記事
- Author/Editor
- 本間 芳和竹中 久貴
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 46(11) 2003.11
- Volume
- 46
- Issue
- 11
- Pages
- 772～776
- Publication date of volume/issue (W3CDTF)
- 2003-11