弾性波デバイス開発の立場から見た圧電薄膜
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CiNii Research
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- Material Type
- 記事
- Title
- Author/Editor
- 橋本 研也
- Author Heading
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 46(11) 2003.11
- Volume
- 46
- Issue
- 11
- Pages
- 777～781
- Publication date of volume/issue (W3CDTF)
- 2003-11