PZT圧電体膜を用いた異常音検知マイクロセンサの作製とその評価
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- Material Type
- 記事
- Author/Editor
- 村上 修一井上 幸二鈴木 義彦 他
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 124(4) 2004.4
- Volume
- 124
- Issue
- 4
- Pages
- 143～147
- Publication date of volume/issue (W3CDTF)
- 2004-04