磁場印加型高周波マグネトロンスパッタ法によるBi系超伝導薄膜の作製 (第44回真空に関する連合講演会プロシーディングス--2003年11月12日～14日,東京)
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- Material Type
- 記事
- Author/Editor
- 藤原 直樹大西 隆洋葛原 宏治 他
- Series Title
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 47(3) 2004.3
- Volume
- 47
- Issue
- 3
- Pages
- 194～196