超高真空仕様表面波励起高密度プラズマ発生装置の評価 (第44回真空に関する連合講演会プロシーディングス--2003年11月12日～14日,東京)
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- Material Type
- 記事
- Author/Editor
- 伴野 達也
- Series Title
- Author Heading
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 47(3) 2004.3
- Volume
- 47
- Issue
- 3
- Pages
- 281～284