大面積Catalytic Chemical Vapor Deposition装置の開発
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- Material Type
- 記事
- Author/Editor
- 大園 修司内山 雄司坪井 秀夫 他
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 47(5) 2004.5
- Volume
- 47
- Issue
- 5
- Pages
- 392～395
- Publication date of volume/issue (W3CDTF)
- 2004-05