Microfabrication and Drilling Using Diffraction-Free Pulsed Laser Beam Generated with Axicon Lens (Special Issue on Micro Mechanical Engineering)
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- Material Type
- 記事
- Title
- Author/Editor
- Masamichi KohnoYoshihiko Matsuoka
- Series Title
- Author Heading
- Periodical title
- JSME international journal. Ser. B, Fluids and thermal engineering
- No. or year of volume/issue
- 47(3) 2004.8
- Volume
- 47
- Issue
- 3
- Pages
- 497～500