ぜい性材料の電気泳動援用研磨(FFF)--帯電砥粒の泳動条件が研磨特性に及ぼす効果
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- Material Type
- 記事
- Author/Editor
- 村上 敏貴黒部 利次
- Periodical title
- 精密工学会誌論文集 / 会誌編集委員会 編
- No. or year of volume/issue
- 70(5) (通号 833) 2004.05
- Volume
- 70
- Issue
- 5
- Sequential issue number
- 833
- Pages
- 640～644