ディップペン・ナノリソグラフィーによる直接描画技術 (特集 メカニカルリソグラフィ)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 志方 浩
- Series Title
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 70(10) (通号 838) 2004.10
- Volume
- 70
- Issue
- 10
- Sequential issue number
- 838