BIT薄膜に及ぼす下部Pt電極の安定性 (特集:シリコン関連材料の作製と評価)

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BIT薄膜に及ぼす下部Pt電極の安定性

(特集:シリコン関連材料の作製と評価)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
7222799
Material type
記事
Author
山口 正樹ほか
Publisher
東京 : 電子情報通信学会
Publication date
2004-12-16
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 104(510) 2004.12.16
Publication Page
p.31~36
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Paper

Material Type
記事
Author/Editor
山口 正樹
山本 麻
佐藤 嘉國 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
104(510) 2004.12.16
Volume
104
Issue
510
Pages
31~36