PECVD成膜装置内での粒子汚染現象に対する操作流量の影響
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- Material Type
- 記事
- Author/Editor
- 林 豊島田 学Heru Setyawan 他
- Author Heading
- Periodical title
- 粉体工学会誌 = Journal of the Society of Powder Technology, Japan / 粉体工学会 編
- No. or year of volume/issue
- 42(2) (通号 429) 2005
- Volume
- 42
- Issue
- 2
- Sequential issue number
- 429
- Pages
- 105～109