高周波放電プラズマにおける基板への熱流束と電力測定 (特集:平成16年基礎・材料・共通部門大会)
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- Material Type
- 記事
- Author/Editor
- 蜂谷 憲一郎江部 健太郎加藤 昭二 他
- Series Title
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 125(3) 2005.3
- Volume
- 125
- Issue
- 3
- Pages
- 223～228