Highly Reliable Piezoelectric Actuator for Precision Stage System
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- Material Type
- 記事
- Author/Editor
- Hiroyuki HashiguchiYoshiya EgashiraHiroyuki Furukawa 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 44(5A) (通号 612) 2005.5
- Volume
- 44
- Issue
- 5A
- Sequential issue number
- 612
- Pages
- 3307～3312