半導体パルスパワー電源のプラズマ応用機器への適用 (小特集 半導体パルスパワー電源の現状と今後--プラズマ研究をささえる半導体パワーデバイス)
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- Material Type
- 記事
- Author/Editor
- 佐久川 貴志浪平 隆男勝木 淳 他
- Series Title
- Periodical title
- プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
- No. or year of volume/issue
- 81(5) 2005.5
- Volume
- 81
- Issue
- 5
- Pages
- 350～354