ナノスクラッチ試験によるSi3N4/Cu薄膜界面損傷機構
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- Material Type
- 記事
- Author/Editor
- 澁谷 忠弘于 強白鳥 正樹 他
- Periodical title
- 日本機械学会論文集. A編
- No. or year of volume/issue
- 71(706) 2005.6
- Volume
- 71
- Issue
- 706
- Pages
- 884～890
- Publication date of volume/issue (W3CDTF)
- 2005-06