特集論文 単結晶シリコンウエハーのミクロンサイズにおける破壊靱性評価 (特集:MEMS/NEMS材料特性および信頼性評価)
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- Material Type
- 記事
- Author/Editor
- 小山 聡高島 和希肥後 矢吉
- Series Title
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 125(7) 2005.7
- Volume
- 125
- Issue
- 7
- Pages
- 302～306