Fabrication of Smart Material PZT Thin Films by RF Magnetron Sputtering Method in Micro Actuators
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- Material Type
- 記事
- Title
- Author/Editor
- Kazuyoshi TsuchiyaToshiaki KitagawaYasutomo Uetsuji 他
- Author Heading
- Periodical title
- JSME international journal. Ser. A, Solid mechanics and material engineering
- No. or year of volume/issue
- 49(2) 2006.4
- Volume
- 49
- Issue
- 2
- Pages
- 201～208
- Publication date of volume/issue (W3CDTF)
- 2006-04