走査型プローブ顕微鏡によるシリコン酸化膜の経時絶縁破壊測定
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- Material Type
- 記事
- Author/Editor
- 安江 孝夫河合 晃
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 27(4) 2006.4
- Volume
- 27
- Issue
- 4
- Pages
- 245～248
- Publication date of volume/issue (W3CDTF)
- 2006-04