高周波マグネトロンスパッタリング法によるPb(Zr,Ti)O3圧電薄膜の量産技術 (第46回真空に関する連合講演会プロシーディングス--2005年11月9日～11日,東京)
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- Material Type
- 記事
- Author/Editor
- 木村 勲西岡 浩菊地 真 他
- Series Title
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 49(3) 2006.3
- Volume
- 49
- Issue
- 3
- Pages
- 174～176