負イオン注入形成Geナノ粒子含有SiO2薄膜の電気的特性 (第46回真空に関する連合講演会プロシーディングス--2005年11月9日～11日,東京)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 洗 暢俊辻 博司後藤 直行 他
- Series Title
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 49(3) 2006.3
- Volume
- 49
- Issue
- 3
- Pages
- 180～182