Si(110)とSi(100)表面の初期酸化過程の違い--リアルタイム光電子分光測定から

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Si(110)とSi(100)表面の初期酸化過程の違い--リアルタイム光電子分光測定から

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
7976230
Material type
記事
Author
末光 眞希ほか
Publisher
東京 : 電子情報通信学会
Publication date
2006-06
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106(108) 2006.6.21・22
Publication Page
p.61~63
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Paper

Material Type
記事
Author/Editor
末光 眞希
加藤 篤
富樫 秀晃 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
106(108) 2006.6.21・22
Volume
106
Issue
108
Pages
61~63
Publication date of volume/issue (W3CDTF)
2006-06