スプール型サーボ弁と層流型高速流量計を用いた空圧式アクティブ除振台の制御
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- Material Type
- 記事
- Author/Editor
- 加藤 友規川嶋 健嗣澤本 晃一 他
- Periodical title
- 精密工学会誌論文集 / 会誌編集委員会 編
- No. or year of volume/issue
- 72(6) (通号 858) 2006.6
- Volume
- 72
- Issue
- 6
- Sequential issue number
- 858
- Pages
- 772～777