雑誌放射線
X線を用いた微細加工...

X線を用いた微細加工技術「LIGAプロセス」 (特集 第17回放射線夏の学校)

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X線を用いた微細加工技術「LIGAプロセス」

(特集 第17回放射線夏の学校)

Call No. (NDL)
Z15-432
Bibliographic ID of National Diet Library
8010191
Material type
記事
Author
平田 嘉裕
Publisher
[東京] : 応用物理学会放射線分科会
Publication date
2006-04
Material Format
Paper
Journal name
放射線 = Ionizing radiation 32(2) 2006.4
Publication Page
p.104~110
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Paper

Material Type
記事
Author/Editor
平田 嘉裕
Author Heading
Periodical title
放射線 = Ionizing radiation
No. or year of volume/issue
32(2) 2006.4
Volume
32
Issue
2
Pages
104~110