Invited: High-k/Metal Gate Stack for Advanced CMOS (AWAD2006)

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Invited: High-k/Metal Gate Stack for Advanced CMOS

(AWAD2006)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
8016572
Material type
記事
Author
奈良 安雄
Publisher
東京 : 電子情報通信学会
Publication date
2006-07
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106(138) 2006.7.3-5
Publication Page
p.89~92
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Bibliographic Record

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Paper

Material Type
記事
Author/Editor
奈良 安雄
Series Title
Author Heading
Alternative Title
招待講演 先端CMOS向けHigh-k/メタルゲートスタック技術
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
106(138) 2006.7.3-5
Volume
106
Issue
138