ターボ分子ポンプ (小特集1 真空作成の最前線)
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CiNii Research
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- Material Type
- 記事
- Title
- Author/Editor
- 尾高 憲二
- Series Title
- Author Heading
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 49(8) 2006.8
- Volume
- 49
- Issue
- 8
- Pages
- 466～469