FIB加工によるカーボン型を用いた石英ガラスのマイクロ・ナノ成形
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- Material Type
- 記事
- Author/Editor
- 高橋 正春前田 龍太郎杉本 公一
- Periodical title
- 塑性と加工 = Journal of the Japan Society for Technology of Plasticity : 日本塑性加工学会論文誌
- No. or year of volume/issue
- 47(549) 2006.10
- Volume
- 47
- Issue
- 549
- Pages
- 958～962
- Publication date of volume/issue (W3CDTF)
- 2006-10