大気圧グロープラズマCVDによる材料合成 (特集 大気圧プラズマの生成と応用)
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- Material Type
- 記事
- Title
- Author/Editor
- 野崎 智洋岡崎 健
- Series Title
- Periodical title
- 電気学会誌 = The journal of the Institute of Electrical Engineers of Japan
- No. or year of volume/issue
- 126(12) 2006.12
- Volume
- 126
- Issue
- 12
- Pages
- 788～791