Characterization of High-Performance Polycrystalline Silicon Complementary Metal-Oxide-Semiconductor Circuits

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Characterization of High-Performance Polycrystalline Silicon Complementary Metal-Oxide-Semiconductor Circuits

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
8605620
Material type
記事
Author
Genshiro Kawachiほか
Publisher
Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Publication date
2007-01
Material Format
Digital
Journal name
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP 46(1) (通号 645) 2007.1
Publication Page
p.51~55
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Digital

Material Type
記事
Author/Editor
Genshiro Kawachi
Yoshiaki Nakazaki
Hiroyuki Ogawa 他
Periodical title
Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
No. or year of volume/issue
46(1) (通号 645) 2007.1
Volume
46
Issue
1
Sequential issue number
645
Pages
51~55