Etching Damage in Diamond Studied Using an Energy-Controlled Oxygen Ion Beam
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- Material Type
- 記事
- Author/Editor
- Yuichi YamazakiKenji IshikawaNorikazu Mizuochi 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 46(1) (通号 645) 2007.1
- Volume
- 46
- Issue
- 1
- Sequential issue number
- 645
- Pages
- 60～64