LFB超音波材料解析システムによるEUVL用TiO2-SiO2超低膨張ガラス基板の評価・選別法の検討 (音響・超音波サブソサイエティ合同研究会)

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LFB超音波材料解析システムによるEUVL用TiO2-SiO2超低膨張ガラス基板の評価・選別法の検討

(音響・超音波サブソサイエティ合同研究会)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
8637749
Material type
記事
Author
大橋 雄二ほか
Publisher
東京 : 電子情報通信学会
Publication date
2007-01-26
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 106(482) 2007.1.26
Publication Page
p.25~30
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Paper

Material Type
記事
Author/Editor
大橋 雄二
荒川 元孝
櫛引 淳一 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
106(482) 2007.1.26
Volume
106
Issue
482
Pages
25~30