ナノ構造化によるDLC膜の耐久性向上 (小特集/ナノ構造化炭素系薄膜の進展)
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- Material Type
- 記事
- Title
- Author/Editor
- 伴 雅人
- Series Title
- Author Heading
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 58(1) 2007.1
- Volume
- 58
- Issue
- 1
- Pages
- 23～27