LIGAプロセスの三次元化とスパイラル型マイクロコイルの作製 (特集:量子ビームが拓くナノ・バイオプロセシング)

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LIGAプロセスの三次元化とスパイラル型マイクロコイルの作製(特集:量子ビームが拓くナノ・バイオプロセシング)

Call No. (NDL)
Z16-795
Bibliographic ID of National Diet Library
8668212
Material type
記事
Author
銘苅 春隆ほか
Publisher
東京 : 電気学会
Publication date
2007-02
Material Format
Paper
Journal name
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems 127(2) 2007.2
Publication Page
p.160~166
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Paper Digital

Material Type
記事
Author/Editor
銘苅 春隆
久住 真治
佐藤 憲昭 他
Periodical title
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
No. or year of volume/issue
127(2) 2007.2
Volume
127
Issue
2
Pages
160~166