Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 清家 善之甘利 昌彦宮地 計二 他
- Alternative Title
- CMP pad cleaning and conditioning technology for the semiconductor manufacturing with super high-pressure micro jet (HPMJ)
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 51(3) (通号 295) 2007.3
- Volume
- 51
- Issue
- 3
- Sequential issue number
- 295