Sensitivity of micro cantilever mass sensor transduced by PZT film (Special issue on "sensor symposium")

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Sensitivity of micro cantilever mass sensor transduced by PZT film(Special issue on "sensor symposium")

Call No. (NDL)
Z16-B380
Bibliographic ID of National Diet Library
8728650
Material type
記事
Author
Jian Luほか
Publisher
東京 : 電気学会
Publication date
2007-03
Material Format
Paper
Journal name
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 127(3) 2007.3
Publication Page
p.126~130
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Paper Digital

Material Type
記事
Author/Editor
Jian Lu
Tsuyoshi Ikehara
Mitsuo Konno 他
Periodical title
電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue
127(3) 2007.3
Volume
127
Issue
3
Pages
126~130